Condition Monitoring and Operational Decision Making in Semiconductor Manufacturing
نویسندگان
چکیده
منابع مشابه
Manufacturing Intelligence for Equipment Condition Monitoring in Semiconductor Manufacturing
For modern semiconductor manufacturing, a large number of interrelated equipment data are automatically collected. These data are usually used for fault detection and classification (FDC). However, unusual measurements may reflect a wafer defect or a change in equipment conditions. Early detection of the equipment condition changes assists with efficient maintenance. This study aimed to develop...
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ژورنال
عنوان ژورنال: IEEE Transactions on Semiconductor Manufacturing
سال: 2013
ISSN: 0894-6507,1558-2345
DOI: 10.1109/tsm.2013.2268861